Contacts at the Nanoscale and for Nanomaterials

Hei Wong1, Jieqiong Zhang2, Jun Liu2

  • 1Department of Electrical Engineering, City University of Hong Kong, Hong Kong, China.

PubMed
Summary

Contact resistance in nano complementary metal-oxide-semiconductor (CMOS) technology is a major challenge due to scaling. This review examines issues and methods for improving ohmic contacts in nano CMOS devices.

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