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Updated: Jul 2, 2025
A Silicon-tipped Fiber-optic Sensing Platform with High Resolution and Fast Response
Published on: January 7, 2019
Recent Progress in MEMS Fiber-Optic Fabry-Perot Pressure Sensors
Ye Chen1, Dongqin Lu2, Huan Xing2
1MIIT Key Laboratory of Aerospace Information Materials and Physics, State Key Laboratory of Mechanics and Control for Aerospace Structures, College of Physics, Nanjing University of Aeronautics and Astronautics, Nanjing 211106, China.
Abstract:
Pressure sensing plays an important role in many industrial fields; conventional electronic pressure sensors struggle to survive in the harsh environment. Recently microelectromechanical systems (MEMS) fiber-optic Fabry-Perot (FP) pressure sensors have attracted great interest. Here we review the basic principles of MEMS fiber-optic FP pressure sensors and then discuss the sensors based on different materials and their industrial applications. We also introduce recent progress, such as two-photon polymerization-based 3D printing technology, and the state-of-the-art in this field, e.g., sapphire-based sensors that work up to 1200 °C. Finally, we discuss the limitations and opportunities for future development.
