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Parasitic Reflection Eliminating for Planar Elements Based on Multi-Frequency Phase-Shifting in Phase Measuring

Siya Huang¹, Yuankun Liu¹, Xin Yu¹

¹College of Electronics & Information Engineering, Sichuan University, Chengdu 610065, China.

Sensors (Basel, Switzerland)

|February 24, 2024

Summary

This study introduces a novel multi-frequency phase-shifting method to overcome parasitic reflections in phase measuring deflectometry (PMD) for accurate specular surface measurement.

Keywords:

multi-frequency method parasitic reflection phase measuring deflectometry

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Area of Science:

Optical metrology
Surface characterization
Precision engineering

Background:

Phase measuring deflectometry (PMD) is crucial for specular surface measurement.
Parasitic reflections from rear surfaces impede accurate top-surface measurements in PMD.
Existing methods struggle to isolate top-surface data from superimposed reflections.

Purpose of the Study:

To develop an effective method for eliminating parasitic reflections in PMD.
To accurately reconstruct the shape of the top surface of specular objects.
To enable reliable surface metrology for challenging samples.

Main Methods:

A novel approach combining multi-frequency and phase-shifting techniques is proposed.
Investigation of the relationship between phase error and fringe frequency.
Establishment of an auxiliary function to identify a specific frequency for zero phase error.

Main Results:

The proposed method successfully isolates the top surface phase by eliminating rear-surface reflections.
Measurements of a 40 mm plane element and a 19 mm flat glass were performed.
Root-mean-square error (RMSE) of up to 20 nm was achieved when compared to interferometry.

Conclusions:

The multi-frequency phase-shifting method effectively addresses parasitic reflections in PMD.
The technique reliably reconstructs the top surface shape of specular objects.
Experimental validation confirms the method's feasibility and accuracy for surface metrology.