PDMS diaphragm based miniature fiber-optic Fabry-Perot dynamic pressure sensor for turbomachinery application

Small-sized, highly sensitive dynamic pressure sensors are crucial in the field of turbomachinery application. In this paper, a fiber-tip structure dynamic pressure sensor utilizing a small piece of glass tube as the air cavity and PDMS material as the diaphragm was fabricated. It has the advantage of being small in size with the diameter of 125 µm while having high sensitivity of 26.26 pm/kPa. The fabrication process was described in detail, which is simple and cost-effective. The sensor characteristics were studied theoretically and experimentally. Quasi-square pressure signal of different frequencies generated by the siren disk were measured by the sensor and compared with that obtained from the commercial piezoresistive pressure sensor to verify the accuracy of the proposed sensor. The R2 of the four pairs of pressure waveforms were 0.94, 0.81, 0.93, and 0.96, respectively. Stability testing of the sensor was also performed, showing that the sensor can work reliably under dynamic pressure environment.