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Adaptive phase-shifting interferometry based on a phase-shifting digital holography algorithm.

Xianxin Han, Yuheng Wang, Zhengyang Bu

|March 5, 2024

Summary

This summary is machine-generated.

This study introduces adaptive phase-shifting interferometry (PSI) for accurate phase retrieval. It synchronizes phase shift measurement and phase retrieval, reducing errors and acquisition time for reliable, high-accuracy results.

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Area of Science:

Optical Metrology
Interferometry
Digital Holography

Background:

Accurate phase shifts are crucial for high-accuracy phase retrieval in phase-shifting interferometry (PSI).
Existing PSI methods can be susceptible to phase-shifting errors and require significant acquisition and calculation time.

Purpose of the Study:

To develop an adaptive PSI system for precise phase retrieval.
To enhance reliability and reduce measurement time in interferometric applications.

Main Methods:

Synchronous capture of phase shift measurement interferograms and phase measurement interferograms.
Utilizing single-spectrum phase shifts measurement algorithm (SS-PSMA) for phase shift calculation.
Employing an adaptive phase-shifting digital holography algorithm (PSDHA) for phase retrieval based on complex amplitude recovery.

Main Results:

Achieved high-accuracy phase retrieval of 0.02 radians.
Demonstrated short calculation time (<25 ms).
Successfully eliminated phase-shifting errors from phase shifters and external disturbances.
Validated suitability for diverse interferogram types (fringe shapes and numbers).

Conclusions:

The proposed adaptive PSI based on PSDHA offers excellent reliability and accuracy.
It significantly reduces interferogram acquisition and phase retrieval calculation times.
This method ensures robust phase shift measurement and phase retrieval, even with varying fringe patterns and disturbances.