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Picometer-Precision Atomic Position Tracking through Electron Microscopy
Published on: July 3, 2021
Shengtong Wang1, Rui Ma1, Feifan Cao1
1Tsinghua Shenzhen International Graduate School, Tsinghua University, Shenzhen 518055, China.
Precision angle measurement is vital for high-end manufacturing. This review details single-axis and multi-axis optical, mechanical, and AI-assisted methods to guide technology selection for diverse manufacturing needs.
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