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Nanoscale surface metrology with a liquid crystal-based phase-shifting angular shearing interferometer.

Debasish Bag, Susanta Chakraborty, Aloka Sinha

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    |April 1, 2024
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    Summary
    This summary is machine-generated.

    This study introduces a novel phase-shifting angular shearing interferometer for optical surface metrology. The liquid crystal-based technique accurately measures step height, offering tunable spatial resolution for advanced optical measurements.

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    Area of Science:

    • Optical metrology
    • Interferometry
    • Liquid Crystal applications

    Background:

    • Optical surface metrology (SM) requires precise measurement techniques.
    • Existing interferometry methods can be complex to analyze.
    • Liquid crystals (LCs) offer tunable optical properties.

    Purpose of the Study:

    • To propose and demonstrate a phase-shifting angular shearing interferometer for SM.
    • To utilize a liquid crystal cell for phase shifting and polarization control.
    • To validate the technique for step height measurement.

    Main Methods:

    • Development of an angular shearing interferometer using a wedge-shaped LC cell and polarization phase shifter.
    • Application of a phase-shifting technique with four phase-shifted interferograms.
    • Analysis using a simplified Wiener deconvolution method for shearing interferograms.
    • Validation through simulation and experimental step height measurement.

    Main Results:

    • Successful demonstration of the interferometer for step height measurement.
    • Experimental accuracy of 5.56% for step height determination.
    • Agreement of results with atomic force microscopy (AFM) measurements.
    • Validation of the simplified Wiener deconvolution method for interferogram analysis.

    Conclusions:

    • The proposed LC-based angular shearing interferometer is effective for optical surface metrology.
    • The technique offers accurate step height measurement with tunable spatial resolution.
    • The simplified analysis method is efficient for shearing interferograms.