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Metasurface array for single-shot spectroscopic ellipsometry.

Shun Wen1, Xinyuan Xue1, Shuai Wang1

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This study introduces a compact metasurface array system for spectroscopic ellipsometry. It enables fast, accurate thin film analysis without mechanical parts, paving the way for high-throughput measurements.

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Area of Science:

  • Materials Science
  • Optical Engineering
  • Nanotechnology

Background:

  • Spectroscopic ellipsometry is crucial for thin film characterization.
  • Conventional systems rely on bulky, mechanically complex components like rotating polarizers and spectrometers.
  • These limitations hinder high-throughput and compact system development.

Purpose of the Study:

  • To develop a compact, mechanically simple spectroscopic ellipsometry system.
  • To achieve single-shot spectropolarimetric detection for rapid thin film analysis.
  • To demonstrate accurate determination of thin film thickness and refractive index.

Main Methods:

  • Utilized a silicon-based metasurface array with anisotropic spectral properties.
  • Implemented iterative optimization algorithms to reconstruct the full Stokes polarization spectrum.
  • Combined metasurface detection with optical modeling for data analysis.

Main Results:

  • Achieved single-shot spectropolarimetric detection without mechanical movement.
  • Accurately determined thin film thickness and refractive index using the metasurface system.
  • Demonstrated high-fidelity reconstruction of the Stokes polarization spectrum.

Conclusions:

  • The metasurface array-based system offers a compact and robust alternative to conventional ellipsometers.
  • This approach enables high-throughput characterization of thin film properties.
  • Opens new avenues for advanced optical metrology and material analysis.