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A uniform step size, low-voltage piezoelectric motor with dual-channel force loop

Hongen Li1, Zhigang Xia1, Liangliang Zhang1

  • 1College of Metrology and Measurement Engineering, China Jiliang University (CJLU), Hangzhou 310018, People's Republic of China.

The Review of Scientific Instruments
|April 18, 2024
PubMed

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