Related Experiment Video
Updated: Jun 27, 2025

07:20
Fabrication of Micro-Patterned Chip with Controlled Thickness for High-Throughput Cryogenic Electron Microscopy
Published on: April 21, 2022
2.6K
Fabricating Precise and Smooth Microgroove Structures on Zr-Based Metallic Glass Using Jet-ECM
Dongdong Li1, Pingmei Ming1, Shen Niu1
1School of Mechanical and Power Engineering, Henan Polytechnic University, Jiaozuo 454003, China.
Micromachines
|April 27, 2024
Summary
Jet electrochemical machining (jet-ECM) with sodium nitrate effectively creates precise microgrooves on Zr-based metallic glasses. This method overcomes challenges in processing these hard materials for advanced mold manufacturing.
Area of Science:
- Materials Science
- Manufacturing Engineering
- Electrochemistry
Background:
- Zr-based metallic glasses (MGs) possess desirable properties for mold manufacturing but are difficult to machine due to high hardness and crystallization.
- Existing microfabrication methods struggle with achieving precision and smoothness on MGs, limiting their application in mold development.
- Jet electrochemical machining (jet-ECM) offers a promising non-contact approach for processing challenging materials.
Purpose of the Study:
- To investigate the feasibility of using jet-ECM with a sodium nitrate electrolyte for fabricating microgroove structures on Zr-based MGs.
- To analyze the electrochemical characteristics of Zr-based MGs in sodium nitrate solution.
- To optimize machining parameters, including applied voltage and nozzle travel rate, for improved microfabrication.
Main Methods:
- Electrochemical characterization of Zr-based MGs in sodium nitrate solution.
- Microfabrication of structures using jet-ECM with varying applied voltages and nozzle travel rates.
- Analysis of geometric dimensional consistency and surface roughness of the fabricated microstructures.
Main Results:
- Successful fabrication of precise micro-helical and micro-S structures with high geometric dimensional consistency.
- Achieved microgroove dimensions of 433.7 ± 2.4 µm width and 101.4 ± 1.6 µm depth, with a surface roughness of 0.118 ± 0.002 µm.
- Demonstrated a significant increase in microgroove depth (101 µm) compared to previous non-aqueous methods (20 µm), with defect-free peripheral areas and surfaces.
Conclusions:
- Jet-ECM using a sodium nitrate electrolyte is a viable and effective technique for microfabricating precise and smooth structures on Zr-based MGs.
- The optimized process enables the creation of high-aspect-ratio microgrooves, surpassing previous limitations.
- This advancement facilitates the broader application of Zr-based MGs in precision mold manufacturing.

