Surface Acoustic Wave Resonator Chip Setup for the Elimination of Interfering Conductivity Responses

Bastian E Rapp1, Achim Voigt2, Marian Dirschka2

  • 1Laboratory of Process Technology, Department of Microsystems Engineering (IMTEK), University of Freiburg, 79110 Freiburg, Germany.

Micromachines
|April 27, 2024
PubMed

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