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Long range topography by dispersion unmatched spectral-domain interferometry based on virtually imaged phased array

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    We developed a new long-range 3D topography method using unmatched dispersion spectral-domain interferometry with virtually imaged phased array (VIPA) modes. This technique enables non-aliasing depth reconstruction for precise surface measurements.

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    Area of Science:

    • Optics and Photonics
    • Metrology
    • Biomedical Engineering

    Background:

    • Traditional 3D topography methods face limitations in range and resolution.
    • Spectral-domain interferometry offers high sensitivity but can suffer from aliasing.
    • Virtually imaged phased arrays (VIPAs) provide high spectral resolution.

    Purpose of the Study:

    • To develop a long-range 3D topography technique with non-aliasing depth reconstruction.
    • To leverage VIPA modes for enhanced spectral resolution in interferometry.
    • To demonstrate the method's feasibility for complex surface metrology.

    Main Methods:

    • Utilized a supercontinuum source filtered by a side-entrance Fabry-Perot etalon to generate two groups of VIPA modes.
    • Implemented an unmatched dispersion method for non-aliasing spectral reconstruction.
    • Employed VIPA modes instead of grating-based spectrometers for high spectral resolution.

    Main Results:

    • Achieved a 10 dB sensitivity falloff over a 10 mm range, demonstrating long-range capability.
    • Successfully reconstructed topography of gauge blocks and a 3D printed tooth model.
    • Quantitatively evaluated the occlusal surface of the tooth model.

    Conclusions:

    • The proposed method enables long-range 3D topography with high spectral resolution and non-aliasing reconstruction.
    • Demonstrated potential applications in precise metrology for complex surfaces, including dental models.
    • VIPA-based spectral-domain interferometry offers a promising alternative to conventional methods.