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Focused Ion Beam Lithography to Etch Nano-architectures into Microelectrodes
Published on: January 19, 2020
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Gentler, nanoscale ion implantation
1Department of Chemical and Biomolecular Engineering, Molecular Science and Engineering Theme, Beckman Institute for Advanced Science and Technology, University of Illinois, Urbana Champaign, Urbana, IL, USA. yingdiao@illinois.edu.
Nature Nanotechnology
|May 6, 2024
Summary
No abstract available in PubMed .
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