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Updated: Jun 26, 2025

Quantitative Atomic-Site Analysis of Functional Dopants/Point Defects in Crystalline Materials by Electron-Channeling-Enhanced Microanalysis
Published on: May 10, 2021
EDIC intensity correction of electron diffraction
Erzsébet Dodony1, István Dódony2, György Sáfrán3
1Hungarian Research Network, Center for Energy Research, Institute of Technical Physics and Materials Science, Thin Film Physics Laboratory, Konkoly-Thege M. St. 29-33, Budapest H-1121, Hungary; Department of Material Physics, Eötvös Loránd University, Pázmány Péter Sétány 1/A, Budapest H-1117, Hungary.
Abstract:
Transmission electron microscopy (TEM) has recently become indispensable in determining crystal structures. The location of atoms in crystals can be determined using electron diffraction (ED) intensity data series if the diffracted intensities are directly proportional to the square of the structure factor (|Fhkl|2). However, due to the crystal thickness, the used electron wavelength and the potential misalignment of the measured crystal the detected intensities differ from the ideal values. A method, Electron Diffraction Intensity Correction (EDIC), and a computer program have been developed to recover the ideal |Fhkl|2 proportional intensities from experimental data for kinematic scattering, for further structure studies.
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