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Related Concept Videos

Inductively Coupled Plasma Atomic Emission Spectroscopy: Principle01:19

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Inductively coupled plasma (ICP) is the most widely used plasma source in atomic emission spectroscopy (AES), also known as Inductively Coupled Plasma Optical Emission Spectroscopy (ICP-OES). The ICP source, or torch, consists of three concentric quartz tubes with argon gas flowing through them. A spark from a Tesla coil initiates the ionization of argon, generating a high-temperature plasma.
The ions and electrons produced interact with the fluctuating magnetic field created by a water-cooled...
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Study of curtaining effect reduction methods in Inconel 718 using a plasma focused ion beam.

F Jaime1, S Desbief2, J Silvent3

  • 1Mines Paris, PSL University, Centre for material forming (CEMEF), UMR CNRS, Sophia Antipolis, France.

Journal of Microscopy
|May 17, 2024
PubMed
Summary
This summary is machine-generated.

Reducing the curtaining effect in focused ion beam (FIB) milling of Inconel 718 is crucial. XeF2 gas injection improved cross-section quality at medium ion beam currents, while Pt deposition and Si masks offered protection.

Keywords:
Inconel 718curtainingplasma FIB

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Area of Science:

  • Materials Science
  • Surface Engineering
  • Nanotechnology

Background:

  • The curtaining effect is a significant challenge in focused ion beam (FIB) surface preparation, particularly for materials like Inconel 718.
  • This phenomenon degrades the quality and accuracy of prepared cross-sections, impacting subsequent analyses.

Purpose of the Study:

  • To investigate and evaluate methods for mitigating the curtaining effect during plasma FIB milling of Inconel 718.
  • To assess the impact of different protective strategies on cross-section quality under varying ion beam conditions.

Main Methods:

  • Exploration of Platinum (Pt) deposition, silicon (Si) mask, and Xenon difluoride (XeF2) gas injection as protective measures.
  • Evaluation under high (30 kV-1 µA) and medium (30 kV-100 nA) ion beam current conditions.
  • Quantitative assessment of curtaining reduction and cross-section quality using Atomic Force Microscopy (AFM) topography.

Main Results:

  • XeF2 gas injection significantly improved cross-section quality at medium ion beam currents.
  • Pt deposition and Si masks individually reduced curtaining, showing greater effectiveness at 100 nA.
  • The Si mask was more effective than Pt deposition in reducing cross-section curvature.
  • Combining protective layers (Pt/Si) with XeF2 injection led to layer degradation and reappearance of curtaining.

Conclusions:

  • XeF2 gas is a promising method for improving cross-section quality in FIB milling of Inconel 718 at medium ion currents.
  • Pt deposition and Si masks are effective for mitigating curtaining, especially at lower ion currents.
  • Synergistic application of protective layers and gas assistance requires careful optimization to avoid detrimental effects.