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Updated: Jun 26, 2025

Fabrication and Testing of Microfluidic Optomechanical Oscillators
Published on: May 29, 2014
Centimeter-scale nanomechanical resonators with low dissipation
Andrea Cupertino1, Dongil Shin1,2, Leo Guo3
1Department of Precision and Microsystems Engineering, Delft University of Technology, Mekelweg 2, 2628 CD, Delft, The Netherlands.
Abstract:
High-aspect-ratio mechanical resonators are pivotal in precision sensing, from macroscopic gravitational wave detectors to nanoscale acoustics. However, fabrication challenges and high computational costs have limited the length-to-thickness ratio of these devices, leaving a largely unexplored regime in nano-engineering. We present nanomechanical resonators that extend centimeters in length yet retain nanometer thickness. We explore this expanded design space using an optimization approach which judiciously employs fast millimeter-scale simulations to steer the more computationally intensive centimeter-scale design optimization. By employing delicate nanofabrication techniques, our approach ensures high-yield realization, experimentally confirming room-temperature quality factors close to theoretical predictions. The synergy between nanofabrication, design optimization guided by machine learning, and precision engineering opens a solid-state path to room-temperature quality factors approaching 10 billion at kilohertz mechanical frequencies - comparable to the performance of leading cryogenic resonators and levitated nanospheres, even under significantly less stringent temperature and vacuum conditions.
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