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Improved Test Fixture for Collecting Microcontact Performance and Reliability Data.

Turja Nandy¹, Ronald A Coutu¹, Rafee Mahbub¹

¹Department of Electrical and Computer Engineering, Marquette University, Milwaukee, WI, 53233, USA.

|May 25, 2024

Summary

This summary is machine-generated.

This study developed an advanced test fixture for microelectromechanical systems (MEMS) ohmic contact switches. The fixture enables high-speed testing, demonstrating microcontact reliability exceeding 200 million cycles for wireless communication applications.

Keywords:

MEMS fabrication contact resistance microcontact microswitch reliability

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Area of Science:

Materials Science
Electrical Engineering
Mechanical Engineering

Background:

Microelectromechanical systems (MEMS) ohmic contact switches are crucial for wireless communication.
The reliability of MEMS switches depends heavily on microcontact performance and longevity.
Existing testing methods lack the precision and speed required for advanced microcontact characterization.

Purpose of the Study:

To develop an improved microcontact test fixture with high actuation rates (KHz) and precise control over position (nm) and force (nN).
To evaluate the performance and reliability of novel MEMS microcontact structures using the developed test fixture.
To validate the potential of the test fixture for future investigations into advanced microcontacts.

Main Methods:

Fabrication of MEMS microcontact test structures using Nickel (Ni)-based fixed-fixed beam structures with Au/RuO2 bimetallic microcontacts.
Characterization of microcontact performance using initial contact tests (ICT) with forces ranging from 200-1000 µN.
Reliability testing using cold switched tests (CST) at a 1 KHz cycle rate.

Main Results:

The developed microcontact test fixture achieved high actuation rates and precise force/position control.
Microcontact structures demonstrated stable contact resistance between 3.8-5.2 Ω during reliability tests.
Tested microcontacts successfully endured over 200 million cycles at 1 KHz, indicating high reliability.

Conclusions:

The developed microcontact test fixture is validated as a capable tool for characterizing MEMS microcontacts.
The experimental results demonstrate the potential of Ni-based microcontacts with Au/RuO2 for reliable MEMS switches.
This work facilitates further research into advanced microcontacts to enhance MEMS switch reliability for wireless applications.