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An Improved Method to Compute the Mutual Capacitance between Interdigital Transducers in Radio Frequency Surface

Yali Zou1, Xinyu Yang2, Ping Luo2

  • 1School of Microelectronics, Shanghai University, Shanghai 200444, China.

Micromachines
|May 25, 2024
PubMed

Keywords:
DMSRF filterinterdigital transducermutual capacitancesurface acoustic wave

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