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Confocal microscopy is an advanced microscopic technique. The prime advantage of the confocal microscope over other microscopy techniques is its ability to block the out-of-focus light from the illuminated samples using pinholes. It is widely used with fluorescence optics to obtain high-resolution, sharp contrast images. Unlike optical microscopes, confocal microscopes use a focused beam of light laser to scan the entire sample surface at different z-planes. These microscopes are, therefore,...
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Related Experiment Video

Updated: Jun 25, 2025

Measuring Spatially- and Directionally-varying Light Scattering from Biological Material
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Extended-Aperture Shape Measurements Using Spatially Partially Coherent Illumination (ExASPICE).

Mostafa Agour1,2, Claas Falldorf1, Ralf B Bergmann1,3

  • 1BIAS-Bremer Institut für angewandte Strahltechnik, 28359 Bremen, Germany.

Sensors (Basel, Switzerland)
|May 25, 2024
PubMed
Summary
This summary is machine-generated.

Shape measurements of micro-parts using SPICE profilometry are enhanced by using multiple LED illumination directions. This novel approach improves measurement accuracy by overcoming aperture limitations, offering a faster, more robust 3D imaging solution.

Keywords:
depth discriminationoptical metrologypartially coherent illuminationshape measurements

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Area of Science:

  • Optical Metrology
  • 3D Imaging
  • Micro-part Measurement

Background:

  • SPICE profilometry uses LED illumination and speckle contrast for 3D shape measurement.
  • Existing SPICE methods offer speed and robustness but are limited by small illumination apertures affecting axial resolution.
  • Confocal and white light interferometry are alternatives but can be slower or less robust.

Purpose of the Study:

  • To overcome the aperture angle limitation in SPICE profilometry.
  • To improve the axial scan resolution and measurement accuracy of SPICE.
  • To present a novel multi-directional LED illumination method for SPICE.

Main Methods:

  • Illuminating the object from different directions using multiple independent LED sources.
  • Utilizing an electrically tunable lens in a 4f-configuration for fast depth scanning.
  • Evaluating speckle contrast for depth discrimination with spatially partially coherent illumination.

Main Results:

  • Reduced the full width at half maximum of the contrast envelope by one-eighth.
  • Achieved a twofold improvement in measurement accuracy compared to standard SPICE.
  • Successfully demonstrated shape measurements of various metal objects.

Conclusions:

  • The proposed multi-directional LED illumination effectively overcomes SPICE's aperture limitation.
  • This method significantly enhances measurement accuracy and axial resolution in 3D profilometry.
  • The technique offers a fast, eye-safe, and robust solution for micro-part 3D shape measurement.