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Updated: Jun 25, 2025

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Energy Dispersive X-ray Tomography for 3D Elemental Mapping of Individual Nanoparticles
Published on: July 5, 2016
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Non-negative matrix factorization-aided phase unmixing and trace element quantification of STEM-EDXS data.
Hui Chen1, Farhang Nabiei2, James Badro3
1Electron Spectrometry and Microscopy Laboratory (LSME), Institute of Physics (IPHYS), École Polytechnique Fédérale de Lausanne (EPFL), Lausanne CH-1015, Switzerland.
Ultramicroscopy
|May 28, 2024
Summary
This study introduces a new semi-automated method combining non-negative matrix factorization and prior knowledge to analyze complex materials using scanning transmission electron microscope-energy-dispersive X-ray spectroscopy (STEM-EDXS) mapping, improving chemical characterization.
Area of Science:
- Materials Science
- Geochemistry
- Electron Microscopy
Background:
- Scanning transmission electron microscope-energy-dispersive X-ray spectroscopy (STEM-EDXS) is vital for material chemical characterization.
- Quantification in STEM-EDXS is difficult for samples with overlapping phases and common elements.
- Electron beam-sensitive materials, like those from Earth's deep mantle, pose additional analytical challenges.
Purpose of the Study:
- To develop a semi-automated methodology for identifying, segmenting, and unmixing phases with significant spectral and spatial overlap in STEM-EDXS data.
- To retrieve accurate energy-dispersive X-ray spectra and phase abundance maps for complex materials.
- To enable reliable trace element quantification in challenging sample matrices.
Main Methods:
- Combining non-negative matrix factorization (NMF) with a priori knowledge of the sample.
- Applying the methodology to an electron beam-sensitive mineral assemblage from Earth's deep mantle.
- Semi-automated phase identification, segmentation, and spectral unmixing.
Main Results:
- Successfully retrieved true EDX spectra for constituent phases in a complex mineral assemblage.
- Generated accurate phase abundance maps, resolving spatial overlap.
- Achieved reliable quantification of trace elements down to approximately 100 ppm concentration levels.
- Demonstrated the method's effectiveness on an electron beam-sensitive sample.
Conclusions:
- The developed methodology effectively overcomes challenges in STEM-EDXS quantification caused by phase overlap and limited signal-to-noise ratio.
- This approach enhances the chemical characterization capabilities for diverse materials systems.
- The technique is adaptable for analyzing various materials with complex spectral and spatial characteristics.

