Surface relief VCSELs at 670 nm with integrated polymer microlens for highly collimated fundamental-mode emission

We demonstrate the integration of a wet-chemically etched surface relief on a vertical-cavity surface-emitting laser (VCSEL) emitting in the red spectral range for higher-order mode suppression. With this relief, fundamental-mode emission is achieved over the entire power range from threshold beyond thermal rollover. For collimation of the emitted beam, we implement polymer microlenses fabricated on-chip by a thermal reflow technique. We reduce the angle of divergence for all injected currents to a maximum of 2^∘. By measuring high-resolution spectra, we show that Gaussian beam profiles correspond to pure fundamental-mode emission which is preserved after implementation of the polymer microlens onto the etched relief, proving the compatibility of the two processes.