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Ohmic Contact Fabrication Using a Focused-ion Beam Technique and Electrical Characterization for Layer Semiconductor Nanostructures
Published on: December 5, 2015
Spatially Controlled Phase Transition in MoTe2 Driven by Focused Ion Beam Irradiations
Meiling Xiao1,2, Ziyu Wu1,2, Guangjian Liu1,2
1School of Physics and Materials Science, Nanchang University, Nanchang, Jiangxi 330031, People's Republic of China.
Focused ion beam irradiation controllably converts semiconducting 2H molybdenum ditelluride (MoTe2) to metallic 1T’-like MoTe2. This enables fabrication of nanoscale MoTe2 homojunctions and enhances transistor performance by over two orders of magnitude.
Area of Science:
- Materials Science
- Condensed Matter Physics
- Nanotechnology
Background:
- Phase transitions are crucial for tailoring the properties of two-dimensional (2D) materials for advanced device applications.
- Molybdenum ditelluride (MoTe2) exhibits distinct semiconducting (2H) and metallic (1T’) phases with unique electronic properties.
Purpose of the Study:
- To investigate the controlled induction of phase transitions in few-layered MoTe2 using focused ion beam (FIB) irradiation.
- To fabricate nanoscale in-plane heterostructures and improve device performance by leveraging these phase transitions.
Main Methods:
- Irradiation of few-layered MoTe2 flakes with gallium (Ga+) ions using a FIB system.
- Utilizing Te defect engineering to drive the semiconducting 2H to metallic 1T’ phase transition.
- Fabrication of submicrometer 1T’-2H MoTe2 in-plane homojunctions.
Main Results:
- Demonstrated controllable phase transition from 2H to 1T’-like MoTe2 via Ga+ ion irradiation.
- Successfully fabricated nanoscale 1T’-2H MoTe2 in-plane homojunctions.
- Achieved over two orders of magnitude improvement in the on-state current of MoTe2 transistors by using 1T’-like phase regions as contact electrodes.
Conclusions:
- Focused ion beam irradiation offers a novel strategy for inducing phase transitions in MoTe2.
- The ability to create patterned phases and heterojunctions enhances MoTe2-based device performance.
- This work expands the application of FIB technology in the field of 2D materials and devices.
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