Characterization of a perfect sinusoidal grating profile using an artificial neural network for plasmonic-based...

In this paper, we present a system intended to detect a targeted perfect sinusoidal profile of a diffraction grating during its manufactured process. Indeed, the sinusoidal nature of the periodic structure is essential to ensure optimal efficiency of specific applications as plasmonic sensors (surface plasmon resonance -based sensors). A neural network is implemented to characterize the geometrical shape of the structure under testing at the end of the laser interference lithography process. This decision tool operates in classifier mode prior to further processing. Then, the geometrical parameters of the structure can be reliably determined if necessary. Two solutions can be considered: the detection of a fixed geometrical shape operating on a binary mode and the identification of a geometrical shape from a limited number of profiles. These methods are validated in the context of plasmonic sensors on experimental sinusoidal grating structures with a grating period of 627 nm.