Stably polarized 795  nm vertical-cavity surface-emitting lasers with anti-phase SiN_x surface gratings

795 nm vertical-cavity surface-emitting lasers (VCSELs) with dielectric surface gratings to control the output polarization are designed and fabricated. The calculated results demonstrate that a well-designed S i N surface grating positioned on the surface of an anti-phase VCSEL structure enhances the reflectivity difference between the two polarization modes compared to a conventional GaAs surface grating, consequently resulting in a larger gain anisotropy in VCSELs and a high orthogonal polarization suppression ratio (OPSR). Characterization shows that a peak-to-peak OPSR of 30.3 dB is achieved at 85°C for 795 nm VCSELs with a S i N surface grating of 5 µm in diameter and an oxide aperture of ∼4µm, demonstrating the effectiveness of the S i N surface grating in polarization control for 795 nm VCSELs.