Tailorable ITO thin films for tunable microwave photonic applications

Tunability is a fundamental prerequisite for functional devices and forms the backbone of reconfigurable microwave photonic (MWP) signal processors. In this paper, we explore the use of indium tin oxide (ITO) thin films, notable for their combination of optical transparency and electrical conductivity, to provide tunability for integrated MWP devices. We study the impacts of post-thermal annealing on the structural, electrical, and optical properties of ITO films. The annealed ITO microheater maintains a low total insertion loss of just 0.1 dB while facilitating the tunability of the microring across the entire free spectral range (FSR) using less than half the voltage required by its non-annealed counterpart. Furthermore, the post-annealed ITO film exhibits a 30% improvement in response time, enhancing its performance as an active voltage-controlled microheater. Leveraging this advantage, we employed the post-annealed device to demonstrate continuous tunable radio frequency (RF) phase shifts from 0-330° across a frequency range spanning 15 GHz to 40 GHz with only 5.58 mW of power. The flexibility in modifying the ITO thin film properties effectively bridges the gap between achieving low-loss and high-speed thermo-optic based microheaters.