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Updated: Jun 24, 2025

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Characterization of SiN Integrated Optical Phased Arrays on a Wafer-Scale Test Station
Published on: April 1, 2020
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Angularly offset multiline dispersive optical phased array enabling large field of view and plateau envelope
Optics Express
|June 11, 2024
Summary
We developed an angularly offset multiline optical phased array (OPA) for efficient beam scanning. This silicon nitride device achieves a wide 152° field of view with stable intensity, enhancing optical system performance.
Area of Science:
- Photonics and Optical Engineering
- Integrated Optics
- Semiconductor Devices
Background:
- Optical phased arrays (OPAs) are crucial for beam steering applications.
- Existing OPAs face limitations in field of view (FOV) and intensity stability.
- Silicon nitride photonics offers advantages for integrated optical devices.
Purpose of the Study:
- To propose and demonstrate a novel angularly offset multiline (AOML) dispersive silicon nitride OPA.
- To achieve efficient line beam scanning with an expanded FOV and stable intensity envelope.
- To integrate multiline OPAs using thermo-optic switches for enhanced performance.
Main Methods:
- Fabrication of a silicon nitride OPA with integrated multiline units and a 45° angular offset.
- Utilizing thermo-optic switches based on multimode interference couplers for seamless integration.
- Implementing oblique polishing techniques for angled facet fabrication.
- Engineering delay lines with adjustable lengths for passive wavelength-tunable beam scanning.
Main Results:
- Demonstrated efficient beam scanning across a wide FOV of 152° via wavelength tuning (1530-1600 nm).
- Achieved a plateau envelope with reduced peak intensity fluctuation (2.8 dB) across the large FOV.
- Measured a dispersive scanning efficiency of 0.97°/nm.
- Successfully switched between multiline OPAs for continuous scanning.
Conclusions:
- The AOML OPA design effectively expands the FOV and improves intensity stability for beam scanning.
- Silicon nitride is a suitable material for fabricating advanced OPAs with integrated functionalities.
- The demonstrated OPA technology holds promise for applications requiring wide-angle, stable optical beam steering.

