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Characterization of SiN Integrated Optical Phased Arrays on a Wafer-Scale Test Station

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Angularly offset multiline dispersive optical phased array enabling large field of view and plateau envelope.

Chenxi Wang, Woo-Bin Lee, Yoon-Ho Sunwoo

|June 11, 2024

Summary

We developed an angularly offset multiline optical phased array (OPA) for efficient beam scanning. This silicon nitride device achieves a wide 152° field of view with stable intensity, enhancing optical system performance.

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Area of Science:

Photonics and Optical Engineering
Integrated Optics
Semiconductor Devices

Background:

Optical phased arrays (OPAs) are crucial for beam steering applications.
Existing OPAs face limitations in field of view (FOV) and intensity stability.
Silicon nitride photonics offers advantages for integrated optical devices.

Purpose of the Study:

To propose and demonstrate a novel angularly offset multiline (AOML) dispersive silicon nitride OPA.
To achieve efficient line beam scanning with an expanded FOV and stable intensity envelope.
To integrate multiline OPAs using thermo-optic switches for enhanced performance.

Main Methods:

Fabrication of a silicon nitride OPA with integrated multiline units and a 45° angular offset.
Utilizing thermo-optic switches based on multimode interference couplers for seamless integration.
Implementing oblique polishing techniques for angled facet fabrication.
Engineering delay lines with adjustable lengths for passive wavelength-tunable beam scanning.

Main Results:

Demonstrated efficient beam scanning across a wide FOV of 152° via wavelength tuning (1530-1600 nm).
Achieved a plateau envelope with reduced peak intensity fluctuation (2.8 dB) across the large FOV.
Measured a dispersive scanning efficiency of 0.97°/nm.
Successfully switched between multiline OPAs for continuous scanning.

Conclusions:

The AOML OPA design effectively expands the FOV and improves intensity stability for beam scanning.
Silicon nitride is a suitable material for fabricating advanced OPAs with integrated functionalities.
The demonstrated OPA technology holds promise for applications requiring wide-angle, stable optical beam steering.