Shadowed versus Etched Superconductor-Semiconductor Junctions in Al/InAs Nanowires.

Joachim E Sestoft1, Mikelis Marnauza1, Dags Olsteins1

  • 1Center for Quantum Devices and Nano-science Center, Niels Bohr Institute, University of Copenhagen, 2100 Copenhagen, Denmark.

Nano Letters
|June 12, 2024
PubMed
Summary

We developed an in situ shadowing technique for fabricating hybrid semiconductor-superconductor devices. This method avoids surface roughening caused by etching, preserving electron mobility and enabling high-quality quantum transport.

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