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Updated: Jun 23, 2025

Comprehensive Characterization of Extended Defects in Semiconductor Materials by a Scanning Electron Microscope
Published on: May 28, 2016
Seungjae Lim1, Tae Wan Kim1, Taejoon Park1
1Department of Physics and Department of Energy Systems Research, Ajou University, Suwon, 16499, South Korea.
Controlled point defects in atomically thin semiconductors were characterized using hyperspectral line imaging (HSLI). Chalcogen-rich samples showed superior optical uniformity, advancing semiconductor device applications.
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