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Related Experiment Video

Updated: Jun 23, 2025

Ohmic Contact Fabrication Using a Focused-ion Beam Technique and Electrical Characterization for Layer Semiconductor Nanostructures

Ohmic Contact Fabrication Using a Focused-ion Beam Technique and Electrical Characterization for Layer Semiconductor Nanostructures

Published on: December 5, 2015

Sub-nanometre quality X-ray mirrors created using ion beam figuring.

Arindam Majhi¹, Riley Shurvinton¹, Paresh Chandra Pradhan¹

¹Diamond Light Source, Harwell Science and Innovation Campus, Didcot OX11 0DE, United Kingdom.

Journal of Synchrotron Radiation

|June 21, 2024

Summary

This summary is machine-generated.

Advancements in ion beam figuring (IBF) achieve high-accuracy X-ray mirror correction. This technique demonstrates optical quality comparable to top-tier commercial optics for demanding scientific applications.

Keywords:

X-ray optics deterministic figuring height error and slope error ion beam figuring (IBF)silicon optics

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Simulation, Fabrication and Characterization of THz Metamaterial Absorbers

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Published on: December 27, 2012

Area of Science:

Materials Science
Optics and Photonics
Surface Metrology

Background:

High-accuracy figure correction is crucial for advanced X-ray optics.
Ion Beam Figuring (IBF) offers a precise method for surface metrology and mirror refinement.

Purpose of the Study:

To present technical advancements in an Ion Beam Figuring instrument.
To demonstrate the capabilities of the IBF system through experimental results on X-ray mirrors.

Main Methods:

Utilized a developed IBF system with a 120mm gridded ion source, a four-axis motion stage, and on-board laser speckle metrology.
Processed two silicon X-ray mirrors for both 1D and 2D figure correction.

Main Results:

Achieved 0.08 nm r.m.s. height error and 44 nrad r.m.s. slope error for 1D correction.
Obtained 0.8 nm r.m.s. height error and 230 nrad r.m.s. slope error for 2D correction over a 67mm x 17mm aperture.
1D correction results are comparable to the highest-grade commercial X-ray optics.

Conclusions:

The advanced IBF instrument at Diamond Light Source enables high-accuracy figure correction of X-ray mirrors.
The demonstrated performance meets the stringent requirements for state-of-the-art X-ray optics.