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Sub-nanometre quality X-ray mirrors created using ion beam figuring.

Arindam Majhi1, Riley Shurvinton1, Paresh Chandra Pradhan1

  • 1Diamond Light Source, Harwell Science and Innovation Campus, Didcot OX11 0DE, United Kingdom.

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|June 21, 2024
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Summary

Advancements in ion beam figuring (IBF) achieve high-accuracy X-ray mirror correction. This technique demonstrates optical quality comparable to top-tier commercial optics for demanding scientific applications.

Keywords:
X-ray opticsdeterministic figuringheight error and slope errorion beam figuring (IBF)silicon optics

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Area of Science:

  • Materials Science
  • Optics and Photonics
  • Surface Metrology

Background:

  • High-accuracy figure correction is crucial for advanced X-ray optics.
  • Ion Beam Figuring (IBF) offers a precise method for surface metrology and mirror refinement.

Purpose of the Study:

  • To present technical advancements in an Ion Beam Figuring instrument.
  • To demonstrate the capabilities of the IBF system through experimental results on X-ray mirrors.

Main Methods:

  • Utilized a developed IBF system with a 120mm gridded ion source, a four-axis motion stage, and on-board laser speckle metrology.
  • Processed two silicon X-ray mirrors for both 1D and 2D figure correction.

Main Results:

  • Achieved 0.08 nm r.m.s. height error and 44 nrad r.m.s. slope error for 1D correction.
  • Obtained 0.8 nm r.m.s. height error and 230 nrad r.m.s. slope error for 2D correction over a 67mm x 17mm aperture.
  • 1D correction results are comparable to the highest-grade commercial X-ray optics.

Conclusions:

  • The advanced IBF instrument at Diamond Light Source enables high-accuracy figure correction of X-ray mirrors.
  • The demonstrated performance meets the stringent requirements for state-of-the-art X-ray optics.