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Optimization of waveguide fabrication processes in lithium-niobate-on-insulator platform
Ch S S Pavan Kumar1, Nikolai N Klimov2, Paulina S Kuo1
1Information Technology Laboratory, National Institute of Standards and Technology, 100 Bureau Drive, Gaithersburg, MD 20899.
AIP Advances
|June 25, 2024
Summary
Researchers optimized fabrication processes for low-loss lithium niobate on insulator (LNOI) waveguides. This work addresses nanofabrication challenges, enabling advanced photonic devices for applications in quantum communications and sensing.
Area of Science:
- Photonics
- Materials Science
- Nanofabrication
Background:
- Lithium niobate (LN) is crucial for spectroscopy, remote sensing, and quantum communications.
- Lithium niobate on insulator (LNOI) technology enhances LN properties like mode confinement and electric field overlap.
- LNOI enables electro-optic modulators with ultra-broad bandwidths, low voltage, and low power consumption, positioning LNOI devices as key players in integrated photonics.
Purpose of the Study:
- To address the significant nanofabrication challenges in producing low-loss lithium niobate on insulator (LNOI) waveguides.
- To systematically investigate and optimize critical fabrication steps, including hard mask selection, plasma etching, and post-etch cleaning.
- To establish a reliable fabrication recipe for low-loss LNOI photonic structures.
Main Methods:
- Investigated various hard mask materials suitable for lithium niobate etching.
- Optimized inductively coupled plasma (ICP) etch parameters for precise LNOI waveguide definition.
- Developed and tested post-etch cleaning procedures to mitigate material redeposition on waveguide sidewalls.
Main Results:
- Successfully fabricated optical waveguides on LNOI with a total loss of -10.5 dB.
- Achieved loss values comparable to those reported in existing literature.
- Demonstrated a viable fabrication process for low-loss LNOI waveguides.
Conclusions:
- The study provides a comprehensive understanding of optimizing fabrication processes for low-loss LNOI waveguides.
- The developed fabrication recipe offers a valuable resource for advancing LNOI technology.
- Addressing nanofabrication challenges is critical for realizing the full potential of LNOI devices in integrated photonics.
