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Updated: Jun 23, 2025
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Using Synchrotron Radiation Microtomography to Investigate Multi-scale Three-dimensional Microelectronic Packages
Published on: April 13, 2016
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Dual-beam X-ray nano-holotomography
Silja Flenner1, Adam Kubec2, Christian David2
1Helmholtz-Zentrum Hereon, Max-Planck-Straße 1, 21502 Geesthacht, Germany.
Journal of Synchrotron Radiation
|June 25, 2024
Summary
This study introduces dual-beam nanotomography for high-resolution imaging. This new method efficiently reduces artifacts and noise, advancing X-ray microscopy techniques.
Area of Science:
- Materials Science
- X-ray Imaging
- Nanotechnology
Background:
- Hard X-ray nanotomography is crucial for material analysis.
- Current multi-beam methods achieve micrometer resolution.
- Scaling to nanoscale is limited by photon flux loss.
Purpose of the Study:
- To develop a multi-beam nanotomography technique for nanoscale imaging.
- To enable simultaneous acquisition of multiple projections.
- To improve efficiency and reduce artifacts in X-ray nanotomography.
Main Methods:
- Utilized a dual-beam Fresnel zone plate (dFZP) in a near-field holography setup.
- Generated two overlapping, nano-focused X-ray beams.
- Applied machine learning for artifact and noise reduction.
Main Results:
- Successfully implemented a dual-beam setup for nanotomography.
- Achieved simultaneous acquisition of two projections from slightly different angles.
- Demonstrated efficient removal of ring artifacts and noise.
Conclusions:
- The dual-beam approach is a viable method for nanoscale imaging.
- This technique enhances efficiency and image quality in X-ray nanotomography.
- Opens avenues for fast holotomography and advanced artifact reduction.
