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ITO-Induced Nonlinear Optical Response Enhancement of Titanium Nitride Thin Films
Peng Lu1, Tingzhen Yan2, Jialei Huang1
1Engineering Research Center of Optical Instrument and System, Ministry of Education and Shanghai Key Lab of Modern Optical System, University of Shanghai for Science and Technology, Shanghai 200093, China.
Abstract:
A series of TiN/ITO composite films with various thickness of ITO buffer layer were fabricated in this study. The enhancement of optical properties was realized in the composite thin films. The absorption spectra showed that absorption intensity in the near-infrared region was obviously enhanced with the increase of ITO thickness due to the coupling of surface plasma between TiN and ITO. The epsilon-near-zero wavelength of this composite can be tuned from 935 nm to 1895 nm by varying the thickness of ITO thin films. The nonlinear optical property investigated by Z-scan technique showed that the nonlinear absorption coefficient (β = 3.03 × 10-4 cm/W) for the composite was about 14.02 times greater than that of single-layer TiN films. The theoretical calculations performed by finite difference time domain were in good agreement with those of the experiments.
