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Sidewall Corrugation-Modulated Phase-Apodized Silicon Grating Filter.

Wei Jiang1, Jijun Feng1, Shuo Yuan1

  • 1Shanghai Key Laboratory of Modern Optical System, Engineering Research Center of Optical Instrument and System (Ministry of Education), School of Optical-Electrical and Computer Engineering, University of Shanghai for Science and Technology, Shanghai 200093, China.

Micromachines
|June 27, 2024
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Summary

This study demonstrates tunable silicon grating filters using sidewall corrugations. These phase-apodized filters offer flexible control over optical communication device performance.

Keywords:
apodized gratinggrating filtersidewall corrugationsilicon photonics

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Area of Science:

  • Photonics
  • Nanotechnology
  • Optical Engineering

Background:

  • Silicon grating filters are crucial components in optical systems.
  • Controlling filter characteristics like resonance wavelength and bandwidth is essential for advanced applications.
  • Sidewall corrugations offer a potential method for tuning filter properties.

Purpose of the Study:

  • To investigate phase-apodized silicon grating filters with modulated sidewall corrugations.
  • To demonstrate flexible tuning of resonance wavelength, extinction ratio, and rejection bandwidth.
  • To validate simulation results with experimental characterization.

Main Methods:

  • Fabrication of silicon grating filters with specific waveguide and grating dimensions.
  • Experimental characterization of devices with varying sidewall corrugation width and location.
  • Comparison of experimental data with simulation results.

Main Results:

  • Resonance wavelength shift of 4.54 nm achieved by altering corrugation width (150-250 nm).
  • Rejection bandwidth varied from 1.19 to 2.03 nm by adjusting corrugation location (50-200 nm).
  • Experimental results showed good agreement with simulations.

Conclusions:

  • Sidewall corrugation modulation provides effective tuning of silicon grating filter performance.
  • These tunable filters hold significant promise for optical communications and semiconductor lasers.
  • The presented approach offers a viable method for designing advanced photonic devices.