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A Novel Deep-Trench Super-Junction SiC MOSFET with Improved Specific On-Resistance

Rongyao Ma1,2, Ruoyu Wang1, Hao Fang2

  • 1School of Microelectronics and Communication Engineering, Chongqing University, Chongqing 400044, China.

Micromachines
|June 27, 2024
PubMed

Keywords:
deep trenchsilicon carbidespecific on-resistancesuper-junction

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