A Single-Clamp Inchworm Actuator with Two Piezoelectric Stacks

Lu Liu1, Zheyang Ji1, Yue Zhang1

  • 1College of Metrology and Measurement Engineering, China Jiliang University, Hangzhou 310018, China.

Micromachines
|June 27, 2024
PubMed
Summary

This study introduces a compact inchworm piezoelectric actuator with a single-clamp design, reducing complexity and size. It achieves a maximum speed of 174.3 μm/s and an 8.6 N output force, advancing precision positioning technology.