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Related Experiment Video

Updated: Jun 22, 2025

Epitaxial Nanostructured α-Quartz Films on Silicon: From the Material to New Devices
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Size-Effect-Based Dimension Compensations in Wet Etching for Micromachined Quartz Crystal Microstructures.

Yide Dong1, Guangbin Dou1, Zibiao Wei1

  • 1SEU-FEI Nano-Pico Center, Key Laboratory of MEMS of Ministry of Education, Southeast University, Nanjing 210096, China.

Micromachines
|June 27, 2024
PubMed
Summary

This study introduces the first dimension compensation strategy for quartz microfabrication, crucial for miniaturized electronic devices. It details how hard mask size affects etching, enabling precise fabrication of quartz crystal devices.

Keywords:
MEMSdimension compensationmicrofabricationquartzwet etching undercut

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Area of Science:

  • Materials Science and Engineering
  • Microfabrication Technology
  • Nanotechnology

Background:

  • Miniaturization of quartz MEMS devices is vital for portable and wearable electronics.
  • Current quartz device fabrication lacks dimension compensation strategies.
  • Wet etching of Z-cut quartz with hard masks is a key microfabrication process.

Purpose of the Study:

  • To investigate the size effect of hard mask patterns on undercut during wet etching of quartz.
  • To propose the first dimension compensation strategy for quartz microfabrication.
  • To improve the fabrication accuracy and pattern position symmetry of quartz crystal devices.

Main Methods:

  • Experimental investigation of wet etching process for Z-cut quartz using Au/Cr metal hard masks.
  • Analysis of undercut formation with varying hard mask pattern sizes (3 μm to 80 μm).
  • Development and application of etching width and position compensation strategies.

Main Results:

  • Larger hard mask width leads to smaller undercut in quartz wet etching.
  • A 30 μm difference in hard mask width caused a 17.2% increase in undercut.
  • Fabrication accuracy improved to 0.7% deviation, and pattern position symmetry enhanced by 96.3%.

Conclusions:

  • The proposed dimension compensation strategy significantly enhances quartz microfabrication accuracy.
  • This method is effective for fabricating ultra-small quartz crystal devices like tuning forks.
  • The findings pave the way for more precise and reliable miniaturized quartz electronic components.