Method of Directly Writing MPA on Photosensitive Surface of Detector Based on FIB

The division of focal plane (DoFP) polarization detector has great potential for the development of aerospace polarimeters, but the existing commercial DoFP polarization detector cannot satisfy all the missions due to the diversity of satellite payloads. Here, we propose a method of directly writing a micro-polarizer array (MPA) on the detector surface based on focused ion beams (FIB) and fabricating a push-broom scanning DoFP polarization detector. The feasibility and low crosstalk of the solution were proved through testing, and the reasons for the low extinction ratio caused by oxidation were explained through characterization and numerical calculations. This scheme is not only applicable to DoFP polarization detectors but also provides ideas for the integration of other metasurface structures and detectors.