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Thermally Oxidized Memristor and 1T1R Integration for Selector Function and Low-Power Memory
Zhidong Pan1, Jielian Zhang1, Xueting Liu1
1School of Semiconductor Science and Technology, South China Normal University, Foshan, 528225, P. R. China.
Summary
Researchers developed a low-power memristor using mild thermal oxidation. This novel resistive switching memory offers ultra-steep switching and improved scalability for advanced computing.
Area of Science:
- Materials Science
- Nanotechnology
- Solid-State Electronics
Background:
- Resistive switching memories are crucial for high-density integration and in-memory computing.
- Challenges include manufacturing complexity, high resistance state leakage, and sneak-path currents limiting scalability.
Purpose of the Study:
- To develop a low-power, ultra-steep memristor using a mild-temperature thermal oxidation technique.
- To address scalability and manufacturing challenges in resistive switching memory.
Main Methods:
- Fabrication of Ag/TiOₓ/SnOₓ/SnSe₂/Au memristor architecture via mild-temperature thermal oxidation.
- Investigation of resistive switching characteristics, including threshold switching behavior and temperature-dependent transitions.
- Integration with 2H-MoTe₂ transistor using van der Waals stacking for 1T1R structure.
Main Results:
- Exceptional threshold switching with a ratio >10⁶, low threshold voltage (~1 V), and long retention (>10⁴ s).
- Ultra-small subthreshold swing (2.5 mV/decade) and high air-stability (>4 months).
- Demonstrated temperature-induced transition from volatile to nonvolatile switching, highlighting oxygen vacancy migration.
Conclusions:
- Mild-thermal oxidation is a viable technique for low-cost, high-performance memristor production.
- The developed memristor shows promise for future in-memory computing applications.
- The 1T1R structure enables selector functionality and multi-value memory with reduced power consumption.
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