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Updated: Jun 21, 2025

Using Synchrotron Radiation Microtomography to Investigate Multi-scale Three-dimensional Microelectronic Packages
Published on: April 13, 2016
Evaluation of an x-ray multilayer mirror for radiography at sub-1-keV photon energies
C Stoeckl1, I A Begishev1, N Dauphin1
1Laboratory for Laser Energetics, University of Rochester, 250 East River Road, Rochester, New York 14623-1299, USA.
Abstract:
An x-ray multilayer mirror on a spherical substrate designed for near-normal incidence with a photon energy of ∼738 eV (F Heα) was procured and tested. This device is intended to be used for in-flight radiography of the shell in inertial confinement fusion experiments with cryogenic targets on the OMEGA laser at the Laboratory for Laser Energetics. Experiments in self-emission on a small (∼10 J) laser system showed that the reflectivity of the mirror is high enough to record an image at laser energies as low as 0.1 J. A second set of tests in backlighting geometry on a larger (kJ)-scale, short-pulse laser yielded usable radiographs with laser energies as low as 40 J with a spatial resolution of ∼10 μm.

