A Micro Capacitive Humidity Sensor Based on Al-Mo Electrodes and Polyimide Film

Quickly sensing humidity changes is required in some fields, such as in fuel cell vehicles. The micro humidity sensor used for the relative humidity (RH) measurement with fast response characteristics, and its numerical model and method are rare. This paper firstly presents a numerical model and method for a parallel plate capacitor and a numerical analysis of its dynamic characteristics. The fabrication of this sensor was carried out based on the numerical results, and, the main characteristics of its moisture-sensitive element are shown. This parallel plate capacitor is made using complementary metal-oxide semiconductor (CMOS)-compatible technology, with a P-type monocrystalline silicon wafer used as the substrate, a thin polyimide film (PI) between the upper grid electrode and the lower parallel plate electrode, and electrodes with a molybdenum-aluminum bilayer structure. The shape of the micro sensor is square with 3 mm on the side of the source field. The humidity sensor has a linearity of 0.9965, hysteresis at 7.408% RH, and a sensitivity of 0.4264 pF/%RH. The sensor displays an average adsorption time of 1 s and a minimum adsorption time of 850 ms when the relative humidity increases from 33.2% RH to 75.8% RH. The sensor demonstrates very good stability during a 240 h test in a 25 °C environment. The numerical model and method provided by this study are very useful for predicting the performance of a parallel plate capacitor.