Dynamics of ionized poly(4-hydroxystyrene)-type resist polymers with tert-butoxycarbonyl-protecting group

Kazumasa Okamoto1,2, Yusa Muroya3, Takahiro Kozawa3

  • 1SANKEN (The Institute of Scientific and Industrial Research), Osaka University, Ibaraki, Osaka, 567-0047, Japan. kazu@sanken.osaka-u.ac.jp.

Scientific Reports
|July 19, 2024
PubMed

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