The Dynamic Modulation Doping Effect of Gas Molecules on an AlGaN/GaN Heterojunction Surface

Ying Ma1,2, Lin Shi3, Liang Chen2,4

  • 1School of Nano-Tech and Nano-Bionics, University of Science and Technology of China, Hefei 230026, China.

Summary

The microscopic origin of the two-dimensional electron gas (2DEG) in AlGaN/GaN HEMTs is clarified by studying gas molecule adsorption on surfaces. This finding advances AlGaN/GaN device fabrication and sensor development.