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A Low-Power and Robust Micromachined Thermal Convective Accelerometer

Yizhou Ye1, Shu Wan1, Chen Hou1

  • 1Key Laboratory of Optoelectronic Technology and Systems, Ministry of Education, Chongqing University, Chongqing 400044, China.

Micromachines
|July 27, 2024
PubMed

Keywords:
MEMSaccelerometerthermal convectiontilt sensor

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