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Updated: Jun 17, 2025

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
Bowen Liu1, Jialuo Cheng2, Maoxiong Zhao3
1State Key Laboratory of Surface Physics, Key Laboratory of Micro- and Nano-Photonic Structures (Ministry of Education) and Department of Physics, Fudan University, 200433, Shanghai, China.
A new multi-distance phase retrieval system accurately characterizes metalens phase distribution. This method aids in optimizing metalens design and functionality by analyzing focal length and aberrations.
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