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Capillary effect-based selective sealing strategy for increasing piezoelectric MEMS speaker performance.

Yan Wang1,2, Tunan Lv1,2, Junning Zhang1

  • 1School of Optical and Electronic Information, Huazhong University of Science and Technology, Wuhan, 430074 China.

Microsystems & Nanoengineering
|August 8, 2024
PubMed
Summary

A new sealing method using liquid polydimethylsiloxane (PDMS) significantly improves the acoustic performance of piezoelectric microelectromechanical systems (MEMS) speakers by reducing air leakage and asynchronous vibrations. This technique enhances sound pressure levels (SPL) at low frequencies and near resonance, offering a robust solution for MEMS acoustic devices.

Keywords:
EngineeringPhysics

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Area of Science:

  • Materials Science
  • Acoustics
  • Electrical Engineering

Background:

  • Microelectromechanical systems (MEMS) speakers face acoustic performance issues like low-frequency sound pressure level (SPL) deterioration due to air leakage.
  • Asynchronous vibrations in cantilever beams near resonant frequencies, caused by fabrication non-uniformity, further degrade MEMS speaker performance.

Purpose of the Study:

  • To propose and demonstrate a novel sealing strategy for piezoelectric MEMS speakers.
  • To address acoustic performance degradation caused by air leakage and asynchronous vibrations.

Main Methods:

  • A sealing strategy involving liquid polydimethylsiloxane (PDMS) filling of air gaps between cantilever beams via capillary effect, followed by curing.
  • Proof-of-concept demonstration using a piezoelectric MEMS speaker design with multiple cantilever beams.
  • Acoustic performance evaluation using an IEC ear simulator to measure SPL and total harmonic distortion (THD).

Main Results:

  • Marked increase in SPL below 100 Hz, with a 4.9 dB improvement at 20 Hz for a 40 Vpp driving voltage.
  • Significant improvement in SPL near resonant frequencies (18 kHz-19 kHz) by approximately 17.5 dB due to reduced asynchronous vibrations.
  • Sealed devices maintained similar SPL response from 100 Hz to 16 kHz, with a THD of 0.728% at 1 kHz (40 Vpp).

Conclusions:

  • The proposed PDMS sealing method effectively enhances low-frequency SPL and mitigates issues from asynchronous vibrations in MEMS speakers.
  • The technique offers advantages such as ease of operation, low damage risk, excellent repeatability, reliability, and robustness.
  • This approach presents a promising technical solution for improving the acoustic performance and reliability of MEMS acoustic devices.