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$Synthesis and Operation of Fluorescent-core Microcavities for Refractometric Sensing$

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Published on: March 13, 2013

CMOS-compatible reconstructive spectrometers with self-referencing integrated Fabry-Perot resonators.

Chunyu You^1,2,3, Xing Li^1,2,3, Yuhang Hu^1,2,3

¹Department of Materials Science & State Key Laboratory of Molecular Engineering of Polymers, Fudan University, Shanghai 200438, People's Republic of China.

Proceedings of the National Academy of Sciences of the United States of America

|August 8, 2024

Summary

We developed a novel miniaturized reconstructive spectrometer using a self-adaptive algorithm and Fabry-Perot resonators. This CMOS-compatible device achieves high-resolution spectral measurements for portable applications.

Keywords:

CMOS-compatible integration Fabry–Perot resonators miniaturized spectrometers silicon nanomembrane

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Area of Science:

Optics and Photonics
Spectroscopy
Microfabrication

Background:

Miniaturized reconstructive spectrometers are crucial for portable and on-chip spectral analysis.
Existing devices face challenges with algorithmic parameter control and CMOS compatibility.
High-resolution spectral measurement is essential for diverse scientific and industrial applications.

Purpose of the Study:

To introduce a novel miniaturized reconstructive spectrometer addressing current technological limitations.
To demonstrate a CMOS-compatible spectrometer with enhanced precision and self-adaptive capabilities.
To pave the way for commercialization of advanced miniaturized spectrometers.

Main Methods:

Integration of a self-adaptive algorithm referenced with Fabry-Perot resonators.
Fabrication using wafer-scale complementary metal-oxide-semiconductor (CMOS) technology.
Spectral testing and performance evaluation across the visible light range.

Main Results:

Achieved a spectral resolution of approximately 2.5 nm.
Demonstrated an average wavelength deviation of about 0.27 nm.
Obtained a resolution-to-bandwidth ratio of approximately 0.46%.

Conclusions:

The developed spectrometer offers precise spectral measurements in the visible range.
The CMOS fabrication and self-adaptive algorithm enhance robustness and applicability.
This technology facilitates the development of versatile and commercially viable miniaturized spectrometers.