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Updated: Jun 17, 2025

Fixed Target Serial Data Collection at Diamond Light Source
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Development of an advanced in-line multilayer deposition system at Diamond Light Source.

Hongchang Wang1, Arindam Majhi1, Wai Jue Tan1

  • 1Diamond Light Source, Didcot, United Kingdom.

Journal of Synchrotron Radiation
|August 9, 2024
PubMed
Summary

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A new multilayer deposition system enables high-quality coatings for large optics. This automated system achieves excellent thickness uniformity for advanced scientific applications.

Area of Science:

  • Materials Science
  • Thin Film Technology
  • Vacuum Systems Engineering

Background:

  • Advanced optical coatings require precise control over multilayer deposition.
  • Existing systems may have limitations in scale, uniformity, or automation.

Purpose of the Study:

  • To develop and commission a novel, large-scale multilayer deposition system.
  • To achieve high-quality, uniform coatings for demanding scientific applications.

Main Methods:

  • A state-of-the-art ultra-high vacuum system with a 4200 mm linear substrate translator.
  • Utilized eight rectangular cathodes for single and multilayer coatings up to 2000 mm.
  • Integrated in situ diagnostic tools for thickness uniformity and stress measurement.
  • Automated deposition processes with comprehensive data logging.
Keywords:
Diamond-IImultilayer deposition systemmultilayersopticssynchrotron radiation

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Related Experiment Videos

Last Updated: Jun 17, 2025

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Main Results:

  • Demonstrated excellent lateral film thickness uniformity of 0.26% over 1500 mm in dynamic mode.
  • System capable of producing periodic, lateral-graded, and depth-graded multilayers.
  • Integrated annealing process up to 700°C within the load-lock chamber.

Conclusions:

  • The developed multilayer deposition system meets the stringent requirements for fabricating advanced optical coatings.
  • The system is suitable for diverse scientific applications, particularly for beamlines at Diamond Light Source.
  • Automation and in situ diagnostics ensure high quality and reliability of deposited films.