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Confocal microscopy is an advanced microscopic technique. The prime advantage of the confocal microscope over other microscopy techniques is its ability to block the out-of-focus light from the illuminated samples using pinholes. It is widely used with fluorescence optics to obtain high-resolution, sharp contrast images. Unlike optical microscopes, confocal microscopes use a focused beam of light laser to scan the entire sample surface at different z-planes. These microscopes are, therefore,...
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Updated: Jun 17, 2025

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Miniaturized confocal Raman and Laser-induced breakdown spectroscopy imaging system based on micro-electro-mechanical

Xu Wang1, Lirong Qiu1, Yun Wang1

  • 1MIIT Key Laboratory of Complex-filed Intelligent Exploration, School of Optics and Photonics, Beijing Institute of Technology, Beijing, 100081, China.

Analytica Chimica Acta
|August 9, 2024
PubMed
Summary

A new miniaturized instrument combines Raman spectroscopy and laser-induced breakdown spectroscopy (LIBS) for high-resolution elemental and molecular analysis. This technology enhances chemical analysis accuracy for space and geological exploration, overcoming previous system size limitations.

Keywords:
Laser-induced breakdown spectroscopyMicro-electro-mechanical mirrorMiniaturizedMulti-spectrum maps fusionRaman spectroscopy

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Area of Science:

  • Geochemistry
  • Planetary Science
  • Analytical Chemistry

Background:

  • High-resolution elemental and molecular structural distribution analysis of unknown minerals is crucial for space and geological exploration.
  • Existing Raman-LIBS imaging methods struggle to balance imaging performance with system volume.
  • There is a need for miniaturized Raman-LIBS imaging with high performance.

Purpose of the Study:

  • To develop a miniaturized Raman-LIBS imaging instrument for enhanced chemical analysis of micro-samples.
  • To combine distribution information from Raman spectroscopy and laser-induced breakdown spectroscopy (LIBS) for improved accuracy.
  • To overcome the limitations of existing methods in terms of system volume and imaging performance.

Main Methods:

  • Developed a miniaturized Raman-LIBS imaging instrument utilizing micro-electro-mechanical (MEMS) mirror technology.
  • Employed dual 2D MEMS mirror scanning to shorten optical length and improve hybrid spectral signal detection efficiency.
  • Achieved an axial focusing ability of approximately 40 nm and lateral resolutions of 700 nm (Raman) and 9.5 μm (LIBS).

Main Results:

  • Successfully obtained 3D high-resolution Raman-LIBS hybrid spectral distribution maps of meteorite Tisserlitine 001.
  • Demonstrated high imaging performance and miniaturization in hybrid spectral imaging.
  • The instrument achieved in-situ spectrum and multispectral imaging with high spatial resolution and stability.

Conclusions:

  • The developed miniaturized Raman-LIBS instrument is a powerful tool for on-site chemical analysis.
  • It enables accurate composition and structural information characterization for space and geological exploration.
  • The instrument addresses the critical need for high-performance, miniaturized hybrid spectral imaging.